Description of the publication:

Authors:

Andrzej Sikora, Teodor Gotszalk, Anna Sankowska, Ivo W Rangelow

Title:

Application of scanning shear–force microscope for fabrication of nanostructures

Journal:

Journal of telecommunications and information technology

Year:

2005

Vol:

1

Pages:

81–84

ISSN/ISBN:

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DOI:

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Link:

http://www.google.pl/url?sa=t&rct=j&q=&esrc=s&source=web&cd=1&cad=rja&ved=0CDsQFjAA&url=http%3A%2F%2Fyadda.icm.edu.pl%2Fbaztech%2Felement%2Fbwmeta1.element.baztech-article-BAT3-0022-0012%2Fc%2Fhttpwww_itl_waw_plczasopismajtit2005181.pdf&ei=GI4UUo_1KIiL7Abj7ICICA&usg=AFQjCNFErAKtiYA6ZkpljOPYkLFVDDdIpw&bvm=bv.50952593,d.ZGU

Keywords:

AFM, nanostructures fabrication, Shear Force microscopy

Abstract:

In view of the rapid growth of interest in AFMs in surface properties investigation and local surface modification we describe here AFM microscope with optical tip oscillation detection. The modular Shear–force/Tunnelling Microscope for surface topography measurement and nanoanodisation is described. The measurement instrument presented here is based on the fiber Fabry–Perot interferometer for the measurement of the conductive microtip oscilation which is used as nano e–beam for local surface anodisation. An advantage of this system is that quatitative measurements of tip vibration amplitude are easily performed.

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Example figure:

The structure developed with the local anodic oxidizing of the surface of the silicon using the combined shear force/ emission microscope.