Description of the publication:

Authors:

Andrzej Sikora

Title:

Correction of structure width measurements performed with a combined shear–force/tunnelling microscope

Journal:

Measurement Science and Technology

Year:

2007

Vol:

18 (2)

Pages:

456–461

ISSN/ISBN:

09570233

DOI:

10.1088/0957–0233/18/2/S18

Link:

http://iopscience.iop.org/0957-0233/18/2/S18

Keywords:

AFM; Measured size correction; Shear–force microscopy; Surface measurement

Abstract:

Atomic force microscopy is one of the most precise and reliable methods for both the creation and the investigation of nanostructures. In order to obtain reliable measurement one must be aware of the specific issues of the method. Non–contact AFM is a particular case, where due to complex tip–sample interaction, specific measurement consideration is necessary. In this paper an analysis of sample surface misshape phenomena in shear–force microscopy is carried out and a method for the estimation of a correction to the lateral size of nanostructures is presented. Some practical examples of the application of this method are given, accompanied by additional investigations with a newly developed combined shear–force/tunnelling microscope, which allows taking a closer look at these phenomena.

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Example figure:

The structure developed with the local anodic oxidizing of the surface of the silicon using the combined shear force/ emission microscope.