Description of the publication:

Authors:

Sikora, A.

Title:

The influence of the electrical field on structures dimension measurement in electrostatic force microscopy mode

Journal:

Optica Applicata

Year:

2009

Vol:

39 (4)

Pages:

933–941

ISSN/ISBN:

00785466

DOI:

-----

Link:

http://www.if.pwr.wroc.pl/~optappl/pdf/2009/no4/optappl_3904p933.pdf

Keywords:

Atomic force microscopy (AFM); Dimensions measurement accuracy; Electrostatic force microscopy (EFM)

Abstract:

Electrostatic force microscopy (EFM) is one of important tools for diagnostic of surface electric properties on micro– and nanoscale. Its usefulness can be particularly seen when the development of new devices or materials is considered and its electric behavior is to be investigated. Due to the accessibility to both the height and the electrostatic distribution in two–dimensional data matrix, one can easily correlate the topography and electric properties of the surface. It is common that experienced AFM users pay attention to the presence of artifacts, but generally only the influence of the height signal on the EFM signal is considered. In the article, the influence of the electrostatic force on the measurement accuracy of structure dimensions will be shown. Also, the way of avoiding the misinterpretation of data will be proposed.

References:

♦ Martin, Y., Williams, C.C., Wickramasinghe, H.K., Atomic force microscope–force mapping and profiling on a sub 100–L’ scale (1987) Journal of Applied Physics, 61 (10), pp. 4723–4729
♦ Stern, J.E., Terris, B.D., Mamin, H.J., Rugar, D., Deposition and imaging of localized charge on insulator surfaces using a force microscope (1988) Applied Physics Letters, 53 (26), pp. 2717–2719
♦ Terris, B.D., Stern, J.E., Rugar, D., Mamin, H.J., Localized charge force microscopy (1990) Journal of Vacuum Science and Technology A, 8 (1), pp. 374–377
♦ (2006) Roadmap of Scanning Probe Microscopy, , MORITA S. [Ed.], Springer, Berlin
♦ Zhong, Q., Inniss, D., Kjoller, K., Elings, V.B., Fractured polymer/silica fiber surface studied by tapping mode atomic force microscopy (1993) Surface Science, 290 (1–2), pp. L688–L692
♦ Klinov, D., Magonov, S., True molecular resolution in tapping–mode atomic force microscopy with high–resolution probes (2004) Applied Physics Letters, 84 (14), pp. 2697–2699
♦ Cleveland, J.P., Anczykowski, B., Schmid, A.E., Elings, V.B., Energy dissipation in tapping–mode atomic force microscopy (1998) Applied Physics Letters, 72 (20), pp. 2613–2615
♦ Sikora, A., Gotszalk, T., Szeloch, R., Combined shear–force/field emission microscope for local electrical surface investigation (2007) Microelectronic Engineering, 84 (3), pp. 542–546
♦ Williams, P.M., Shakesheff, K.M., Davies, M.C., Jackson, D.E., Roberts, C.J., Tendler, S.J.B., Blind reconstruction of scanning probe image data (1996) Journal of Vacuum Science and Technology B, 14 (2), pp. 1557–1562
♦ Villarrubia, J.S., Scanned probe microscope tip characterization without calibrated tip characterizers (1996) Journal of Vacuum Science and Technology B, 14 (2), pp. 1518–1521
♦ Sikora, A., Gotszalk, T., The issues of near field interaction detection in developed combined shear force/emission microscope (2009) Journal of Physics: Conference Series, 146, p. 012036
♦ Isrelachvili, J., (2003) Intermolecular and Surface Forces, , Academic Press, London
♦ Zitzler, L., Herminghaus, S., Mugele, F., Capillary forces in tapping–mode atomic force microscopy (2002) Physical Review B, 66 (15), p. 155436
♦ Luan, B.Q., Robbins, M.O., The breakdown of continuum models for mechanical contacts (2005) Nature, 435, pp. 929–932; Nonnenmacher, M., O'boyle, M.P., Wickramasighe, H.K., Kelvin probe force microscopy (1991) Applied Physics Letters, 58 (25), pp. 2921–2923
♦ Jacobs, H.O., Knapp, H.F., Muller, S., Stemmer, A., Surface potential mapping: A qualitative material contrast in SPM (1997) Ultramicroscopy, 69 (1), pp. 39–49
♦ Kitamura, S., Suzuki, K., Iwatsuki, M., High resolution imaging of contact potential difference using a novel ultrahigh vacuum non–contact atomic force microscope technique (1999) Applied Surface Science, 140 (3–4), pp. 265–270

Example figure:

Combined 3D topography and electrostatic force microscopy image of biased test sample.

Used methods:

TapppingMode
Electrostatic Force Microscopy