The description of EFM - Electrostatic Force Microscopy

Electrostatic Force Microscopy (EFM) is a secondary imaging mode derived from TappingMode that measures electric field gradient distribution above the sample surface. This is performed through LiftMode. In EFM, a voltage may be applied between the tip and the sample. The cantilever's resonance frequency and phase change with the strength of the electric field gradient and are used to construct the EFM image. For example, locally charged domains on the sample surface are mapped in a way that is similar to how MFM maps magnetic domains.

 

Examples (click to enlarge)


Fragment of integrated circiut. CCD camera view.
 

3D view of the IC shown above. Scan size 80x80um.

2D view of the IC shown above. Scan size 80x80um.

View of the electrical field distribution on the IC's surface. Power disabled. The edges lines are artifacts. Scan size 80x80um.

View of the electrical field distribution on the IC's surface. Power enabled. Scan size 80x80um.

Fragment of integrated circiut. In central area the diffusion resistors are visible. CCD camera view.

2D view of IC's shown above (fragments of diffusion resistors). Scan size 80x80um.

View of the electrical field distribution on the IC's surface. Power disabled. The edges lines are artifacts. Scan size 80x80um.

View of the electrical field distribution on the IC's surface. Power enabled. The voltage dropout along the resistors structures is visible. Scan size 80x80um.


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